SOLVED:Electrostatic clamps are used for holding workpieces while they are being machined, for holding silicon wafers during electron beam microfabrication, etc. They comprise an insulated conducting plate maintained at a potential of several thousand volts and covered with a thin insulating sheet. The workpiece or the wafer rests on the sheet and is grounded. It is advisable to apply a film of oil to the sheet to prevent sparking. One particular type operates at 3000 volts and has holding power
SOLVED:Electrostatic clamps are used for holding workpieces whil…
3 months ago
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