College of Material, Chemistry and Chemical Engineering, Key Laboratory of Organosilicon Chemistry and Material Technology, Ministry of Education, Hangzhou Normal University, Hangzhou 311121, Zhejiang ...
Abstract: In this paper, a capacitive pressure sensor for high-temperature application is proposed. This sensor includes three parts: a capacitive pressure-sensitive chip fabricated from green tapes ...
Abstract: We present the design, fabrication and characterization of an on-chip, ultra-high sensitivity temperature sensor using asymmetric Mach-Zehnder interferometer (MZI) on silicon-on-insulator ...
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